Mary G. Puma
Overview
Mary G. Puma received an average of $1M in total compensation, including $511K in salary, at Axcelis Technologies from 2006 to 2020.
2020Axcelis TechnologiesChief Executive Officer and President
2019Axcelis TechnologiesChief Executive Officer and President
2018Axcelis TechnologiesChief Executive Officer and President
2017Axcelis TechnologiesChief Executive Officer and President
2016Axcelis TechnologiesChief Executive Officer and President
2015Axcelis TechnologiesChief Executive Officer and President
2014Axcelis TechnologiesChief Executive Officer and President
2013Axcelis TechnologiesChief Executive Officer and President
2012Axcelis TechnologiesChairman, Chief Executive Officer and President
2011Axcelis TechnologiesChairman, Chief Executive Officer and President
Source: SEC filings on March 25, 2021, March 30, 2020, March 27, 2019, March 27, 2018, March 29, 2017, March 14, 2016, March 25, 2014, March 26, 2013, March 23, 2010, April 2, 2009, and March 30, 2007.
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